Equipment for Polysilicon Production
For over 60 years, Armstrong Chemtec has manufactured large, heavy-duty, reliable equipment for the process industries. We offer a wide selection of proven heating and vaporizing equipment for use in the production of polysilicon.
- VAPORIZERS: Convert chlorine, HCl, mono-, di-, tri-chlorosilanes, silicon tetrachloride liquids to vapor.
- FLUIDIZED BED RADIANT HEATERS: Add heat to a fluidized bed to control reaction temperatures.
- PROCESS COIL RADIANT HEATERS: Heat a process gas stream of high pressure/ high temperature fluid such as silicon tetrachloride, trichlorosilane, hydrogen.
- IMMERSION HEATERS: Provide heat to process gas streams such as hydrogen.
For more information, visit us at our company website at www.rmarmstrong.com